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Home
About
Products
- Atomic Layer Deposition
- Gas Analysis
- - Gas Analyzers/Mass Spectrometers
- Gas Generators
- Heaters
- Leak Detectors
- - Helium Sniffing/Vacuum
- - Hydrogen Sniffing
- - Multi-gas Sniffing
- - Refrigerant Sniffing
- - Other Leak Detectors
- Mass Flow Control & Measurement
- - Automatic Pressure Regulation
- - Mass Flow Calibration
- - Flow Controllers & Meters
- - Liquid Mass Flow Control & Vaporization
- - Mass Flow Control Power Supplies
- Pressure Measurement & Control
- - Capacitance Manometers
- - Power Supplies
- - Upstream Pressure Control
- PVD Deposition Chemicals
- Thin Film Deposition
- - Deposition Monitors & Controllers
- - Quartz Crystal Sensors and Feedthroughs
- - Quartz Monitor Crystals
- Vacuum Measurement
- - Capacitance Manometers
- - Portable Vacuum Gauges
- - Vacuum Gauge Controllers
- - Vacuum Switches
- - Vacuum Gauges
- Vacuum Valves, Chambers & Components
News & Articles
Quotes
Service
- FTIR Applications Support
- Health & Safety Form (.doc)
Contact
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| SF100 Maskless Photolithography Tool System Requirements
SF100 Maskless Photolithography Tool System Requirements
The SF100 gives you the ability to rapidly project master images directly onto your substrates enabling faster development time without the requirement for a photomask. This document is intended to assist us to provide you with the model which best meets your design requirements. We ask your assistance by filling in as much detail as possible.
Contact Information
Name
*
Phone
*
Email
*
Application
What is your primary area of focus?
Nanotechnology
Microchemistry
MEMS
Biotechnology
RF & Microwave Devices
Microfluidics
Is your primary requirement
Production
Research/Engineering
Please provide application description
(e.g. require patterning around corners on rectangular substrates)
Do you require 3D patterning?
Yes
No
Not Sure
Importance of Features
Please rate the importance of your desired features below
(Low Importance) 1 2 3 4 5 (High Importance)
Maskless
1
2
3
4
5
Substrate Material
1
2
3
4
5
What materials do you intend to pattern?
(e.g. Silicon, quartz, ceramic, metal, plastic, photomask blanks, biological tissue, other...)
Substrate Size & Shape
1
2
3
4
5
What is your substrate Size and Shape?
(e.g. Wafer 300 mm x 300 mm; Large Area Substrate 1 m x 1 m)
What is the substrate structure?
(e.g. Flat, curved, flexible (thin films, plastics), cone, cylinder…)
What is the weight of the substrate?
Will substrate types and sizes change frequently?
Yes
No
Not Sure
Substrate Write Area
1
2
3
4
5
What is the actual write area you require on the substrate?
Substrate Thickness
1
2
3
4
5
What is the substrate thickness?
Minimum Features Size
1
2
3
4
5
Desired Minimum Line Widths (um)
Standard Optics: 45.0, 15.0 / High Resolution Optics: 5.00, 2.00, 1.00 / Sub-micron Filter 2.8, 1.17, 0.56 um
Type of Resist
1
2
3
4
5
Type of Resists to be patterned
Thickness of Patterning
1
2
3
4
5
What is the thickness of resist to be patterned?
Exposure Wavelength
1
2
3
4
5
Desired exposure wavelengths:
435 nm
405 nm
365 nm
Other
If Other, please specify:
Grayscale Capability
1
2
3
4
5
If Gray Scale is required, what do you want to do with it?
Tool Footprint
1
2
3
4
5
What is the available space to locate the tool?
Software Capabilities
1
2
3
4
5
Which software options are important for your operation?
Microserialization Software to differentiate parts or devices
Autofeature sensing and drawing
Grayscale drawing
Remote system access
Other
If Other, please specify:
What Engineering Design/Drawing programs are currently utilized by your facility?
Budget
1
2
3
4
5
What is your capital budget?
What is your budget for consumables?
Other
Is the tool going to be located in
a user facility
an Individual lab
Is there a dedicated operator?
Yes
No
Not sure
How many people will require training?
What additional tool options do you require?
Controlled Environment Processing Chamber for processing in oxygen free environments
Multiwavelength Spectrometer for measuring light intensity between 200-1100 nm
Fast Switch Optics
Cassette to cassette wafer loader
Microfluidics Research Platform
Are there any other features or options that may not have been listed that you require?
Verification
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*
Example: 12
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