FabGuard ® Suite
Acquisition, Analysis, Interdiction and Reporting in one Fully Integrated System
In Situ Particle Detectors
INFICON Stiletto® is a scanning-laser particle detection system that can find yield-limiting particle contamination in real time on every wafer
Integrated Process Monitoring
Integrated Process Monitoring delivers direct measurement of process conditions for on-time metrology.
Leak Detectors
Defining Speed and Accuracy in Leak Detection
RF Sensing Technology with FabGuard
Combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs
Residual Gas Analyzers (RGAs)
Used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases.
Plasma Diagnosis Endpoint Monitor, EV-140C
This is an emission analysis type end-point monitor intended for end-point detection or plasma condition control in the plasma-based semiconductor thin-film process.
Real Time Interferometric Process Monitor, DIGILEM-CPM-Xe/Halogen - [CCD] External Light Source Interference Camera
Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.
Real Time Interferometric Process Monitor , LEM-CT-670-G50 - [CCD] Laser Interference Camera
Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.
Highly Sensitive Silica Monitor - SLIA-300
This product provides enhanced support for the pure water processes in the production of semiconductors.