Canada Analytical & Process Technologies
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CI-100 Electron Beam Gun Crucible Indexer
Versatile, Reliable Control of Multi-Pocket E-Beam Sources
FabGuard Suite FabGuard ® Suite
Acquisition, Analysis, Interdiction and Reporting in one Fully Integrated System
In Situ In Situ Particle Detectors
INFICON Stiletto® is a scanning-laser particle detection system that can find yield-limiting particle contamination in real time on every wafer
Integrated Process Monitoring Integrated Process Monitoring
Integrated Process Monitoring delivers direct measurement of process conditions for on-time metrology.
Leak Detectors

Leak Detectors
Defining Speed and Accuracy in Leak Detection

Sion RF Sensing Technology with FabGuard
Combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs
RGA Residual Gas Analyzers (RGAs)
Used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases.
Quartz Crystals Thin Film Deposition Controllers/QCM Measurement Instruments
Control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision.
Plasma Diagnosis Endpoint Plasma Diagnosis Endpoint Monitor, EV-140C
This is an emission analysis type end-point monitor intended for end-point detection or plasma condition control in the plasma-based semiconductor thin-film process.
Real Time Interferometric Real Time Interferometric Process Monitor, DIGILEM-CPM-Xe/Halogen - [CCD] External Light Source Interference Camera
Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.
Real Time Interferometric Real Time Interferometric Process Monitor , LEM-CT-670-G50 - [CCD] Laser Interference Camera
Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.
Highly Sensitive Silica Monitor Highly Sensitive Silica Monitor - SLIA-300
This product provides enhanced support for the pure water processes in the production of semiconductors.
  Phone: (613) 226-1115    Toll Free: (866) 384-3666    Fax: (613) 226-5429    E-mail: info@captcanada.com