All Metal Mass Flow Controller

SEC-Z501X The new types of mass flow controllers: SEC-Z501X series features metal seals and all the internal surfaces that come into contact with gas are polished, making the series perfect for use in ultra-clean environments. The series features piezo actuator valves (≤50 SLM) and a newly developed PID algorithm that ensures high-speed response across the entire flow control range For more information, click here

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