CS-152
The CS-152 standard clean monitor is a high-precision chemical concentration monitor designed for use with the SC-2 solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-152 continually monitors the concentrations of the various components of the SC-2 solutions (HCl/H2O2/H2O) used to remove metal ions. Feedback control based on the monitor output is used to keep the concentrations of the SC-2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. A short measuring cycle allows the accurate tracking of chemical concentrations, while the compact design facilitates integration with a cleaning device.

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