XTC/3 Thin Film Deposition Controller

Inficon XTC/3 Thin Film Deposition Controller

  • Single or Multiple layers
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping
  • Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
  • XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources

 

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