XTC/3 Thin Film Deposition Controller
Inficon XTC/3 Thin Film Deposition Controller
- Single or Multiple layers
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping
- Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
- XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
Brochure | Download