Mass Flow Control – True Multi-gas/Multi-range Calibration

Common Features of Horiba MG/MR:

  • Analog (0-5 VDC or 4-20 mA) and
  • Digital RS485 (F-Net), Device-Net, or Profibus
  • Real Gas Accuracy ±1% Set Point
  • Fast response variable PID algorithm ~ 500 msec to reach any set-point
  • Free Configuration Software and updates > 400 gases
  • Adapters provided for 100% compatibility to other controllers
  • Also available as single Dedicated Gas
  • No Gas Correction Factor

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Horiba SEC-Z500X
Horiba SEC-Z500X, True All Metal
• Piezo Valve for greater control precision
• 0.01 sccm to 500 slm
• Electro-polished < 5 Ra surface finish throughout
• All Metal Seals including valve seal

Horiba SEC-N100
Horiba SEC-N100MGM, Metal Sealed
• 3 sccm to 200 slm
• Meal Sealed – Teflon valve seat

Horiba SEC-N100MGR, Viton Sealed
• 3 sccm to 200 slm
• Viton Seals

 

Horiba Criterion Pressure Insensitive
Horiba Criterion Pressure Insensitive
• Turn Down Ratio 200:1

Horiba SEC-Z500X, True All Metal | Brochure
Horiba SEC-N100 | Brochure
Horiba Criterion Pressure Insensitive | Brochure

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