Transpector XPR3 High Pressure Gas Analysis System

Inficon Transpector XPR3 High Pressure Gas Analysis System

  • 20 mTorr to ultrahigh vacuum
  • Does not require differential pumping system
  • 10 ppm detection limit of impurities
  • EM works at PVD process pressures, providing faster, cleaner data collection.
  • Longer quadrupole permits improved filtering at the low mass range and improved abundance sensitivity, for better hydrogen detection sensitivity.

 

Technical Specifications | Download
Application Note | Download