Transpector CPM Compact Process Monitor
Inficon Transpector CPM Compact Process Monitor
- 1E-8 Torr (1.3E-8 mbar) to 2 atmospheres
- Quadrupole-based gas analysis system for monitoring complex processes.
- Allows 24/7 monitoring.
- Compact, Lightweight and easily transportable.
- HexBlock™ sampling system maximizes performance.
- Built-in CDG for process pressure monitoring and vacuum interlock.
- Optional calibration reference available for tuning and gas reference.
- Long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
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