Inficon Transpector CPM Compact Process Monitor

• 1E-8 Torr (1.3E-8 mbar) to 2 atmospheres
• Quadrupole-based gas analysis system for monitoring complex processes.
• Allows 24/7 monitoring.
• Compact, Lightweight and easily transportable.
• HexBlock™ sampling system maximizes performance.
• Built-in CDG for process pressure monitoring and vacuum interlock.
• Optional calibration reference available for tuning and gas reference.
• Long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.