Transpector CPM Compact Process Monitor

Inficon Transpector CPM Compact Process Monitor

  • 1E-8 Torr (1.3E-8 mbar) to 2 atmospheres
  • Quadrupole-based gas analysis system for monitoring complex processes.
  • Allows 24/7 monitoring.
  • Compact, Lightweight and easily transportable.
  • HexBlock™ sampling system maximizes performance.
  • Built-in CDG for process pressure monitoring and vacuum interlock.
  • Optional calibration reference available for tuning and gas reference.
  • Long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.


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