SQM-160 Multi-film Deposition Monitor
Inficon SQM-160 Multi-film Deposition Monitor
- Two sensor inputs standard; four additional sensor inputs as option
- Two recorder outputs provide analog rate and thickness signals
- Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor
- Rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes
- High accuracy option: 0.03Hz at 10 readings/sec
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