SQM-160 Multi-film Deposition Monitor

Inficon SQM-160 Multi-film Deposition Monitor 

  • Two sensor inputs standard; four additional sensor inputs as option
  • Two recorder outputs provide analog rate and thickness signals
  • Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor
  • Rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes
  • High accuracy option: 0.03Hz at 10 readings/sec


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