Mass Flow Control – Compact / Modular

Axetris 2000 Series OEM based mass flow controller / meter

  •  Ultra compact modular design reduces size and weight
  • 20 sccm to 3000 sccm
  • Analog or Digital
  • Fast Response; 4 msec flow; 150 msec control
  • High Accuracy; 1% of Reading with 1:1000 turn down
  • Multi-gas / Multi-range or Dedicated Gas
    • O2, N2, Air, CO2, Argon, H2, Helium
  • True Gas Calibration – NIST traceable
  • Low pressure drop

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