Mass Flow Control – Compact / Modular

Axetris 2000 Series MEMS based mass flow controller / meter

  • Compact modular design reduces size and weight
  • 20 sccm to 20000 sccm
  • Analog, 0-5 VDC, 4-20mA, Digital RS232, RS485
  • Fast Response; 4 msec flow; 150 msec control
  • High Accuracy; 1% of Reading
  • Large Dynamic Range: 1:1000 turn down
  • Multi-gas / Multi-range or Dedicated Gas
    • O2, N2, Air, CO2, Argon, H2, Helium
  • True Gas Calibration – NIST traceable
  • Low pressure drop

Brochure | Download
Mass Flow-Based Pressure Controller MPC 2000 brochure | Download
Mass Flow Meter (MFM 2100) & Mass Flow Controller (MFC 2100) Data Sheet | Download
Mass Flow Controller Modules (MFC 2000 & 2200) Data Sheet | Download
Mass Flow Meter Modules (MFM 2000 & 2200) Data Sheet | Download

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