Axetris 2000 Series MEMS based mass flow controller / meter

• Compact modular design reduces size and weight
• 20 sccm to 20000 sccm
• Analog, 0-5 VDC, 4-20mA, Digital RS232, RS485
• Fast Response; 4 msec flow; 150 msec control
• High Accuracy; 1% of Reading
• Large Dynamic Range: 1:1000 turn down
• Multi-gas / Multi-range or Dedicated Gas
  • O2, N2, Air, CO2, Argon, H2, Helium
• True Gas Calibration – NIST traceable
• Low pressure drop