Mass Flow Control – Compact / Modular
Axetris 2000 Series MEMS based mass flow controller / meter
- Compact modular design reduces size and weight
- 20 sccm to 20000 sccm
- Analog, 0-5 VDC, 4-20mA, Digital RS232, RS485
- Fast Response; 4 msec flow; 150 msec control
- High Accuracy; 1% of Reading
- Large Dynamic Range: 1:1000 turn down
- Multi-gas / Multi-range or Dedicated Gas
- O2, N2, Air, CO2, Argon, H2, Helium
- True Gas Calibration – NIST traceable
- Low pressure drop
Brochure | Download
Mass Flow-Based Pressure Controller MPC 2000 brochure | Download
Mass Flow Meter (MFM 2100) & Mass Flow Controller (MFC 2100) Data Sheet | Download
Mass Flow Controller Modules (MFC 2000 & 2200) Data Sheet | Download
Mass Flow Meter Modules (MFM 2000 & 2200) Data Sheet | Download