CDGsci “CUBE” High Accuracy Capacitance Manometer
CDGsci “CUBE” High Accuracy Capacitance Manometer
- Full scale ranges from 100 mTorr … 1000 Torr
- High Accuracy (≤ 0.025 % Rd accuracy; ≤ 50 ppm FS Repeatability)
- High Stability (< 5 ppm FS/ °C temperature stability; < 70 ppm FS/ year long term stability)