Particle Detection Systems

	In Situ Particle Detectors INFICON Stiletto® is a scanning-laser particle detection system that can find yield-limiting particle contamination in real time on every wafer.		INLINE PARTICLE SENSOR for ULTRA-PURE WATER PLCA-800 Series The PLCA-800 series inline particle sensors have been designed to count the particles in ultra-pure water used in semiconductor and liquid crystal manufacturing processes
	Reticle / Mask Particle Detection System , PR-PD2HR Ultra sensitive detection down to 0.35 µm, suitable for detection of chrome, glass and pellicle surfaces		Reticle/Mask Particle Detection System, PR-PD2 Ultra sensitive detection down to 0.35um. Efficiently provides particle detection with high throughput
	Reticle/Mask Particle Detection System, PR-PD3 Wide Ranging Applications, Compact and Low Operating Cost		FPD Mask Particle Detection System, PR-PD4 Featuring a high net working rate and stability over the long term, the HORIBA PD Series has attained a solid reputation in semiconductor fabrication plants.
	Reticle / Mask Particle Detection System, PR-PD5 Compact, low operating cost, and wide ranging applications, suitable for detection of both glass, chrome and pellicle surfaces.		Reticle/Mask Particle Remover, RP-1 Automatically removes particles by blow and vacuum suctionAutomatically removes particles from the reticle/mask by air (or N2) blow and vacuum suction.

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