Gas/Liquid MFC | Canada Analytical & Process Technologies

Gas
	Pressure Insensitive Mass Flow Module High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.	Multi Range/ Multi Gas , SEC-Z500X Programmable high performance mass flow controller
	All Metal Mass Flow Controller , SEC-Z501X Perfect for use in ultra-clean environments	Solenoid valve , SEC-E series Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.
	High Temperature Digital Mass Flow Controller , SEC-8000F/D Digital mass flow controller for high temperature environments	High temperature　mass flow controller , SEC-8000 A best-seller mass flow controller for high temperature environments
	Thermal Sensor Detection , SEC-Z700 Evolved thermal technology derived from the most reliable and accurate digital flow controllers.	All Metal Solenoid , SEC-E440J Metal seals at a low cost
Liquid
	Digital Liquid Mass Flow Meters / Controllers , LF-F/LV-F series Featuring the world's first sensor with a unique cooling method, the LF-F and LV-F series can measure and control chemicals which can not be measured by thermal sensors which heat the liquid.	Mixed Injection System Liquid Vaporizers , MI/MV series The MI/MV series can efficiently vaporize liquids using a gas-liquid mixture that allows for complete vaporization, this in a unit not much larger than a mass flow controller.
	Direct Liquid Injection System , VC series The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.	Compact Baking System , LSC series Compact baking system suitable for a range of liquid source delivery applications.
	Liquid Auto Refill System , LU Series The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.	Liquid source vaporization systems , TL series The TL series enables large flow stable vaporization of liquid sources at atmospheric pressure.
Calibrators
	High Precision Film Flow Meter , SF-1U・2U High precision flow rate measurement with one-touch operation.