Liquid Auto Refill System | Canada Analytical & Process Technologies

LU Series
The LU-A1000 series liquid material refill system provides automatic, safe, waste-free material supply to liquid material baking systems (LSC series) and injection systems (MI, MV, VC series). The LU-A1000 series complies with all SEMI S2.S8.S14.CE marking safety standards. In order to prevent operation errors during the dangerous procedure of tank replacement, the LU-A1000 series includes a function for automatically implementing a remaining liquid purge sequence (provided as a standard LU-A1000 series function). Maintenance efficiency and product throughput have also been improved with the LU-A1000 series.

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