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  HF/HCl Concentration Monitor

HF-HCI

HF-960H
The HF-960H accurately measures concentrations of hydrofluoric and hydrochloric acid used in semiconductor manufacturing and other processes. Measurement is based on conversion to concentration from four-electrode conductivity measurements, so a wide range of measurements is possible, from low to high concentrations. The dedicated FES-510 series sensor is made from materials that are highly resistant to chemicals, making this unit ideal for the management of hydrofluoric and hydrochloric acid, even in high concentrations.

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