CS-100FI Series
The HORIBA CS-100F1 Series of chemical solution concentration monitors target the need for highly accurate concentration monitoring of chemical solutions used in the etching and cleaning processes during semiconductor manufacturing. They offer real-time, inline measurement by directly integrating the sample cell into the cleaning system piping, by using fiber optic cable for light signal transmission, a single concentration monitor can be used to measure up to four types of chemical solutions; or ranges and single-line monitoring of multiple chemical solutions in single-bath/single-wafer cleaning systems. In addition a cell unit type is available with feedback concentration control for applications that demand higher accuracy.

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